Patent Assignment
Reel/Frame 061106/0704
Assignment of Assignor's Interest
Recorded: 2022-09-15
Pages: 3
Assignors
VORONIN, SERGEY
Executed: 2022-09-14
WANG, QI
Executed: 2022-09-14
HAJIBABAEINAJAFABADI, HAMED
Executed: 2022-09-14
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Bombardment with Ions having Targeted Mass using Pulsed Bias Phase Control