Patent Assignment
Reel/Frame 061171/0520
Assignment of Assignor's Interest
Recorded: 2022-09-21
Pages: 4
Assignors
CHANG, CHUN-YEN
Executed: 2021-02-23
SHEN, YU-TIEN
Executed: 2021-02-23
YANG, CHIH-KAI
Executed: 2021-02-23
CHANG, YA-HUI
Executed: 2021-02-23
CHANG, SHIH-MING
Executed: 2021-02-26
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Etch Apparatus for Compensating Shifted Overlayers