Patent Assignment
Reel/Frame 061173/0556
Assignment of Assignor's Interest
Recorded: 2022-09-21
Pages: 3
Assignor
GRZESKOWIAK, STEVEN
Executed: 2022-09-20
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and Apparatus for In-Situ Dry Development
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.