Patent Assignment
Reel/Frame 061206/0151
Assignment of Assignor's Interest
Recorded: 2022-09-25
Pages: 7
Assignors
VAN DEN BRINK, MARINUS AART
Executed: 2018-08-15
CAO, YU
Executed: 2018-06-27
ZOU, YI
Executed: 2018-11-02
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Machine Learning Based Inverse Optical Proximity Correction and Process Model Calibration