Patent Assignment
Reel/Frame 061206/0513
Assignment of Assignor's Interest
Recorded: 2022-09-25
Pages: 7
Assignors
NAM, SUNGMIN
Executed: 2022-08-20
JEONG, JAESEUNG
Executed: 2022-08-20
KIM, DONGHO
Executed: 2022-08-20
YANG, SEUNGHUNE
Executed: 2022-08-20
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Scanning Electron Microscope Image-Based Pitch Walk Inspection Method and Method of Manufacturing Semiconductor Device Comprising the Inspection Method