Patent Assignment
Reel/Frame 061247/0626
Assignment of Assignor's Interest
Recorded: 2022-09-28
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Raw Material Feeding Device, Substrate Processing System, and Residual Estimation Method