Patent Assignment
Reel/Frame 061251/0815
Assignment of Assignor's Interest
Recorded: 2022-09-29
Pages: 10
Assignors
AKIYAMA, KOJI
Executed: 2022-09-12
NAGAI, HIROYUKI
Executed: 2022-08-28
IWASHITA, MITSUAKI
Executed: 2022-08-29
UEDA, HIROKAZU
Executed: 2022-08-22
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Electrocaloric Effect Element, Heat Transfer Device, Semiconductor Manufacturing Device, and Electrocaloric Effect Element Control Method