Patent Assignment
Reel/Frame 061252/0760
Assignment of Assignor's Interest
Recorded: 2022-09-29
Pages: 6
Assignors
CHO, SUNGSIL
Executed: 2019-05-21
CHANG, SEOBONG
Executed: 2019-05-21
PARK, JAE EON
Executed: 2019-05-21
HENDRIX, BRYAN C.
Executed: 2019-05-02
BAUM, THOMAS H.
Executed: 2019-05-02
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Method for Forming Carbon Rich Silicon-Containing Films
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.