Patent Assignment
Reel/Frame 061264/0732
Assignment of Assignor's Interest
Recorded: 2022-09-30
Pages: 5
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Forming a Pattern of Semiconductor Device of a Semiconductor Device on a Semiconductor Substrate by Using an Extreme Ultraviolet Mask
Application:
17/956,919 →
Publication:
US 2023/0106148