Patent Assignment
Reel/Frame 061275/0132
Assignment of Assignor's Interest
Recorded: 2022-09-30
Pages: 10
Assignors
FOCA, EUGEN
Executed: 2022-09-11
KLOCHKOV, DMITRY
Executed: 2022-08-30
KORB, THOMAS
Executed: 2022-08-27
NEUMANN, JENS TIMO
Executed: 2022-09-01
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Methods of Cross-Section Imaging of an Inspection Volume in a Wafer
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.