Patent Assignment
Reel/Frame 061277/0025
Assignment of Assignor's Interest
Recorded: 2022-09-30
Pages: 7
Assignors
KIM, DAEJUNG
Executed: 2022-07-27
KANG, MINYOUNG
Executed: 2022-07-25
KIM, SUNGSOO
Executed: 2022-07-25
KIM, SOHEE
Executed: 2022-08-03
YOO, YONGSOO
Executed: 2022-07-25
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Processing Apparatus and Substrate Alignment Method Using the Same