Patent Assignment
Reel/Frame 061325/0981
Assignment of Assignor's Interest
Recorded: 2022-10-05
Pages: 5
Assignors
WU, CHIA-WEI
Executed: 2022-02-28
YANG, HAO
Executed: 2022-03-07
CHOU, HSIAO-CHIEH
Executed: 2022-03-07
CHAO, CHUN-HUNG
Executed: 2022-04-26
HUANG, JAO SHENG
Executed: 2022-04-26
YANG, NENG-JYE
Executed: 2022-03-07
HUANG, KUO-BIN
Executed: 2022-02-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Air Curtain Device and Workpiece Processing Tool