Patent Assignment
Reel/Frame 061396/0415
Assignment of Assignor's Interest
Recorded: 2022-10-12
Pages: 4
Assignors
KANAKASABAPATHY, SIVANANDA KRISHNAN
Executed: 2021-03-25
TAN, SAMANTHA S.H.
Executed: 2021-04-21
YU, JENGYI
Executed: 2021-03-25
LEE, YOUNGHEE
Executed: 2021-03-26
JENSEN, ALAN J.
Executed: 2021-04-26
LI, DA
Executed: 2021-03-25
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Apparatus and Process for Euv Dry Resist Sensitization by Gas Phase Infusion of a Sensitizer
Application:
17/905,754 →
Publication:
US 2024/0192590