Patent Assignment
Reel/Frame 061398/0951
Assignment of Assignor's Interest
Recorded: 2022-10-12
Pages: 3
Assignor
KOBAYASHI, TAKESHI
Executed: 2022-09-27
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Ignition Controlling Method, Film Forming Method, and Film Forming Apparatus