Patent Assignment
Reel/Frame 061408/0316
Assignment of Assignor's Interest
Recorded: 2022-10-13
Pages: 9
Assignors
ONO, YOUSUKE
Executed: 2022-07-11
ISHIKAWA, HISAKO
Executed: 2022-06-30
OGAWA, RYOHEI
Executed: 2022-06-29
OKUBO, ATSUSHI
Executed: 2022-06-29
KOHMURA, KAZUO
Executed: 2022-06-29
SEKIGUCHI, ATSUKO
Executed: 2022-06-29
KATO, YUICHI
Executed: 2022-06-30
YAMADA, TAKEO
Executed: 2022-06-29
ZHOU, YING
Executed: 2022-06-29
Assignees
MITSUI CHEMICALS, INC.
5-2, HIGASHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-7122, JAPAN
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
3-1, KASUMIGASEKI 1-CHOME, CHIYODA-KU, TOKYO, 100-8921, JAPAN
Covered Property
(1)
Pellicle Film for Photolithography, Pellicle, Photolithography Mask, Photolithography System, and Method of Producing Pellicle Film for Photolithography