Patent Assignment
Reel/Frame 061410/0060
Assignment of Assignor's Interest
Recorded: 2022-10-13
Pages: 3
Assignors
SU, YI-CHEN
Executed: 2021-11-08
WANG, TZU-YI
Executed: 2021-10-27
LIEN, TA-CHENG
Executed: 2021-10-24
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Enhancing Lithography Operation for Manufacturing Semiconductor Devices