Patent Assignment
Reel/Frame 061412/0727
Assignment of Assignor's Interest
Recorded: 2022-10-13
Pages: 5
Assignor
HATAKEYAMA, JUN
Executed: 2022-09-07
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
4-1, MARUNOUCHI 1-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process