Patent Assignment
Reel/Frame 061418/0297
Assignment of Assignor's Interest
Recorded: 2022-10-13
Pages: 5
Assignors
VERGÖHL, MICHAEL
Executed: 2022-08-01
PFLUG, ANDREAS
Executed: 2022-08-01
ZICKENROTT, TOBIAS
Executed: 2022-08-11
BRUNS, STEFAN
Executed: 2022-08-29
Assignee
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
HANSASTRASSE 27C, MÜNCHEN, 80686, GERMANY
Covered Property
(1)
Device and Method for Producing Layers with Improved Uniformity in Coating Systems with Horizontally Rotating Substrate and Additional Plasma Sources