Patent Assignment
Reel/Frame 061422/0755
Assignment of Assignor's Interest
Recorded: 2022-10-14
Pages: 2
Assignor
NOMURA, HARUYUKI
Executed: 2022-09-09
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Charged Particle Beam Writing Method and Charged Particle Beam Writing Apparatus