Patent Assignment
Reel/Frame 061434/0230
Assignment of Assignor's Interest
Recorded: 2022-09-14
Pages: 20
Assignors
MAEDA, KOJI
Executed: 2022-01-17
SHIMADA, ATSUSHI
Executed: 2022-01-17
OIKAWA, KATSUSHI
Executed: 2022-05-09
MIYASHITA, TETSUYA
Executed: 2022-01-17
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Apparatus and Film Forming Method