Patent Assignment
Reel/Frame 061435/0473
Assignment of Assignor's Interest
Recorded: 2022-10-15
Pages: 7
Assignors
TAE, PATRICK
Executed: 2022-09-15
SU, CAIJUN
Executed: 2022-09-16
JAGANNATH, RAVICHANDRA
Executed: 2022-10-14
AHR, BRIAN
Executed: 2022-09-19
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Confocal Chromatic Metrology for EUV Source Condition Monitoring