Patent Assignment
Reel/Frame 061442/0571
Assignment of Assignor's Interest
Recorded: 2022-10-17
Pages: 14
Assignors
ENDO, HIROKI
Executed: 2022-09-05
NAGASHIMA, NOZOMU
Executed: 2022-09-13
SATO, SUGURU
Executed: 2022-09-20
ITO, KOEI
Executed: 2022-09-05
SEGUCHI, TAISEI
Executed: 2022-09-06
KITAGAWA, DAI
Executed: 2022-10-11
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Maintenance Method for Substrate Processing Apparatus