Patent Assignment
Reel/Frame 061450/0277
Assignment of Assignor's Interest
Recorded: 2022-10-18
Pages: 3
Assignors
TSAI, YU-HAO
Executed: 2022-10-14
WANG, MINGMEI
Executed: 2022-10-14
ZHANG, DU
Executed: 2022-10-14
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method to Selectively Etch Silicon Nitride to Silicon Oxide Using Water Crystallization