Patent Assignment
Reel/Frame 061460/0796
Assignment of Assignor's Interest
Recorded: 2022-10-18
Pages: 6
Assignee
GIGAPHOTON INC.
400, OAZA YOKOKURASHINDEN, OYAMA-SHI, TOCHIGI, 323-8558, JAPAN
Covered Property
(1)
Extreme Ultraviolet Light Generation System and Electronic Device Manufacturing Method
Application:
18/047,587 →
Publication:
US 2023/0161262