Patent Assignment
Reel/Frame 061460/0957
Assignment of Assignor's Interest
Recorded: 2022-10-18
Pages: 6
Assignee
GIGAPHOTON INC.
400, OAZA YOKOKURASHINDEN, OYAMA-SHI, TOCHIGI, 323-8558, JAPAN
Covered Property
(1)
Line Narrowing Gas Laser Device, Wavelength Control Method, and Electronic Device Manufacturing Method