Patent Assignment
Reel/Frame 061469/0886
Assignment of Assignor's Interest
Recorded: 2022-10-19
Pages: 2
Assignee
HITACHI HIGH-TECH CORPORATION
17-1, TORANOMON 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method