Patent Assignment
Reel/Frame 061530/0670
Assignment of Assignor's Interest
Recorded: 2022-10-25
Pages: 4
Assignors
LIU, WEI-MIN
Executed: 2022-02-28
WEN, CHENG-YEN
Executed: 2022-03-01
SU, LI-LI
Executed: 2022-09-21
LI, CHII-HORNG
Executed: 2022-02-28
YEO, YEE-CHIA
Executed: 2022-02-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Nano-Structure Transistors with Air Inner Spacers and Methods Forming Same