Patent Assignment
Reel/Frame 061552/0767
Assignment of Assignor's Interest
Recorded: 2022-10-26
Pages: 3
Assignor
RASCHKE, RUSS V.
Executed: 2022-05-26
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Extreme Ultraviolet Inner Pod Seal Gap
Application:
17/973,170 →
Publication:
US 2023/0129336