Patent Assignment
Reel/Frame 061553/0099
Assignment of Assignor's Interest
Recorded: 2022-10-27
Pages: 3
Assignor
ISAKA, YUKI
Executed: 2022-09-05
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Illumination Apparatus, Measurement Apparatus, Substrate Processing Apparatus, and Method for Manufacturing Article