Patent Assignment
Reel/Frame 061576/0041
Assignment of Assignor's Interest
Recorded: 2022-10-28
Pages: 8
Assignors
MATSUMOTO, SHUSAKU
Executed: 2022-10-20
KAWANO, KOICHIRO
Executed: 2022-10-12
KATO, SHIGUMA
Executed: 2022-10-11
Assignee
KIOXIA CORPORATION
1-21, SHIBAURA 3-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus