Patent Assignment
Reel/Frame 061584/0144
Assignment of Assignor's Interest
Recorded: 2022-10-28
Pages: 3
Assignor
MATSUMOTO, WATARU
Executed: 2022-10-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Apparatus and Substrate Transfer Method
Application:
17/976,280 →
Publication:
US 2023/0143372