Patent Assignment
Reel/Frame 061598/0641
Assignment of Assignor's Interest
Recorded: 2022-10-31
Pages: 12
Assignors
LUO, XIANGANG
Executed: 2022-08-25
MA, XIAOLIANG
Executed: 2022-08-25
PU, MINGBO
Executed: 2022-08-25
GAO, PING
Executed: 2022-08-25
LI, XIONG
Executed: 2022-08-25
Assignee
THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES
P.O.BOX 350, SHUANGLIU, CHENGDU, SICHUAN, 610209, CHINA
Covered Property
(1)
Multifunctional Lithography Device