Patent Assignment
Reel/Frame 061616/0143
Assignment of Assignor's Interest
Recorded: 2022-11-01
Pages: 6
Assignors
FUKUSHIMA, MASAHIRO
Executed: 2022-09-28
KIKUCHI, SHUN
Executed: 2022-09-28
OHASHI, MASAKI
Executed: 2022-09-28
KATAYAMA, KAZUHIRO
Executed: 2022-09-28
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
4-1, MARUNOUCHI 1-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Molecular Resist Composition and Patterning Process