Patent Assignment
Reel/Frame 061634/0905
Assignment of Assignor's Interest
Recorded: 2022-11-02
Pages: 3
Assignor
YAMAZAKI, RYOJI
Executed: 2022-10-11
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Source and Plasma Processing Apparatus