Patent Assignment
Reel/Frame 061652/0068
Assignment of Assignor's Interest
Recorded: 2022-11-03
Pages: 4
Assignors
SUSA, YOSHIO
Executed: 2022-10-19
AIDA, KOEI
Executed: 2022-10-19
MIYAMA, RYO
Executed: 2022-10-23
KIKUCHI, YOSHIYUKI
Executed: 2022-10-18
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method and System for Selectively Removing Material at an Edge of a Substrate
Application:
17/973,903 →
Publication:
US 2023/0137026