Patent Assignment
Reel/Frame 061652/0398
Assignment of Assignor's Interest
Recorded: 2022-11-03
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Apparatus and Substrate Transfer Method
Application:
17/980,255 →
Publication:
US 2023/0154777