Patent Assignment
Reel/Frame 061680/0509
Assignment of Assignor's Interest
Recorded: 2022-11-07
Pages: 4
Assignors
BREUER, JOHN
Executed: 2022-10-27
EHBERGER, DOMINIK
Executed: 2022-10-27
FIRNKES, MATTHIAS
Executed: 2022-10-27
Assignee
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH
AMMERTHALSTR. 20, HEIMSTETTEN, D-85551, GERMANY
Covered Property
(1)
Method of Determining a Brightness of a Charged Particle Beam, Method of Determining a Size of a Source of the Charged Particle Beam, and Charged Particle Beam Imaging Device