Patent Assignment
Reel/Frame 061712/0372
Assignment of Assignor's Interest
Recorded: 2022-11-09
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Profile Control for Semiconductor Manufacturing
Application:
18/054,083 →
Publication:
US 2024/0153770