Patent Assignment
Reel/Frame 061747/0151
Assignment of Assignor's Interest
Recorded: 2022-11-13
Pages: 8
Assignors
CHOUAIB, HOUSSAM
Executed: 2019-10-25
HU, DAWEI
Executed: 2019-11-05
LIN, KAI-HSIANG
Executed: 2019-11-12
ROSENBURG, AARON
Executed: 2019-10-25
TAN, ZHENGQUAN
Executed: 2019-11-13
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, SUITE 407, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Scatterometry Based Methods And Systems For Measurement Of Strain In Semiconductor Structures