Patent Assignment
Reel/Frame 061793/0435
Assignment of Assignor's Interest
Recorded: 2022-11-16
Pages: 4
Assignors
ZHANG, DU
Executed: 2022-11-08
TSAI, YU-HAO
Executed: 2022-11-15
WANG, MINGMEI
Executed: 2022-11-08
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Sidewall Inorganic Passivation for Dielectric Etching Via Surface Modification
Application:
17/988,217 →
Publication:
US 2024/0162043