Patent Assignment
Reel/Frame 061826/0857
Assignment of Assignor's Interest
Recorded: 2022-11-18
Pages: 3
Assignors
SAKIYAMA, YUKINORI
Executed: 2020-11-25
BAKER, NOAH ELLIOT
Executed: 2020-11-30
RANA, NIRAJ
Executed: 2020-11-25
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Detection and Location of Anomalous Plasma Events in Fabrication Chambers