Patent Assignment
Reel/Frame 061832/0133
Assignment of Assignor's Interest
Recorded: 2022-11-18
Pages: 4
Assignor
YANG, YOUNG HWAN
Executed: 2022-11-04
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Processing Apparatus and Process Control Method Thereof
Application:
17/990,644 →
Publication:
US 2023/0163003