Patent Assignment
Reel/Frame 061854/0586
Assignment of Assignor's Interest
Recorded: 2022-11-22
Pages: 14
Assignors
SHINDO, TAKEHIRO
Executed: 2022-11-10
LI, DONGWEI
Executed: 2022-10-31
JIANG, LINGXIN
Executed: 2022-10-28
OKANO, SHINYA
Executed: 2022-11-02
KODAMA, TOSHIAKI
Executed: 2022-10-31
MATSUMOTO, WATARU
Executed: 2022-10-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus for Transferring Substrate and Method for Transferring Substrate