Patent Assignment
Reel/Frame 061895/0109
Assignment of Assignor's Interest
Recorded: 2022-11-28
Pages: 3
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Systems, Devices, and Methods for Registering a Superstrate of an Imprint Tool
Application:
18/059,291 →
Publication:
US 2024/0178042