Patent Assignment
Reel/Frame 061896/0271
Assignment of Assignor's Interest
Recorded: 2022-11-28
Pages: 5
Assignors
FULLER, MATTHEW A.
Executed: 2022-05-26
EGGUM, SHAWN D.
Executed: 2022-02-23
SMITH, MARK V.
Executed: 2022-05-26
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Methods of Installing a Purge Fluid Conditioning Element into a Semiconductor Substrate Carrying Container