Patent Assignment
Reel/Frame 061912/0818
Assignment of Assignor's Interest
Recorded: 2022-11-29
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
System for Processing Substrate and Maintenance Method Thereof