Patent Assignment
Reel/Frame 061976/0862
Assignment of Assignor's Interest
Recorded: 2022-12-05
Pages: 14
Assignors
LIU, JIMMY
Executed: 2022-11-18
ROSENZWEIG, GUY
Executed: 2022-11-18
YANG, CHENGLONG
Executed: 2022-11-18
HARRIS, MICHAEL
Executed: 2022-11-18
KOAI, KEITH K.
Executed: 2022-11-18
BLESSING, JAMES
Executed: 2022-11-19
Assignee
MKS INSTRUMENTS, INC.
2 TECH DRIVE, SUITE 201, ANDOVER, MASSACHUSETTS, 01810
Covered Property
(1)
Methods and Systems for Feedback Control in Plasma Processing Using Radical Sensing
Application:
17/983,934 →
Publication:
US 2023/0369033
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.