Patent Assignment
Reel/Frame 062007/0757
Assignment of Assignor's Interest
Recorded: 2022-12-07
Pages: 8
Assignors
INAGAKI, MORIHITO
Executed: 2022-11-22
HIGUCHI, TAKUYA
Executed: 2022-12-06
HANE, HIDEOMI
Executed: 2022-11-22
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Heat Treatment Apparatus, Control Method, and Storage Medium