Patent Assignment
Reel/Frame 062016/0919
Assignment of Assignor's Interest
Recorded: 2022-12-07
Pages: 4
Assignee
IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
C/O HANYANG UNIVERSITY, 222 WANGSIMNI-RO, SEONGDONG-GU, SEOUL, 04763, KOREA, REPUBLIC OF
Covered Property
(1)
Etching Apparatus and Etching Method Using the Same