Patent Assignment
Reel/Frame 062046/0681
Assignment of Assignor's Interest
Recorded: 2022-12-09
Pages: 4
Assignors
LIN, RAN
Executed: 2020-07-03
YANG, WENBING
Executed: 2020-07-01
MUKHERJEE, TAMAL
Executed: 2020-07-01
YU, JENGYI
Executed: 2020-07-01
TAN, SAMANTHA SIAMHWA
Executed: 2020-07-04
PAN, YANG
Executed: 2020-07-01
FAN, YIWEN
Executed: 2020-07-01
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method for Cleaning a Chamber